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SPIE Proceedings [SPIE SPIE Commercial + Scientific Sensing and Imaging - Anaheim, California, United States (Sunday 9 April 2017)] Image Sensing Technologies: Materials, Devices, Systems, and Applications IV - Radio frequency sputtered Al x N y thin films for thermal detectors
Dhar, Nibir K., Dutta, Achyut K., Calvano, Nicholas, Chrostoski, Phillip, Voshell, Andrew, Braithwaite, Keesean, Prather, Dennis, Jhabvala, Murzy, Rana, Mukti M.Volume:
10209
Year:
2017
Language:
english
DOI:
10.1117/12.2267089
File:
PDF, 540 KB
english, 2017