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[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Comparison of Nanomechanical Behavior of the Amorphous and Crystalline Phases of ALD HfO2
Tapily, Kandabara, Jakes, Joseph, Shrestha, Pragya R., Gu, Diefeng, Baumgart, H., Elmustafa, AbdelmageedVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2980002
File:
PDF, 1.45 MB
english, 2008