Surface Damage Mechanism of Monocrystalline Si Under...

Journal of Electronic Materials 2017 / 3 Vol. 46; Iss. 3

Surface Damage Mechanism of Monocrystalline Si Under Mechanical Loading

Zhao, Qingliang, Zhang, Quanli, To, Suet, Guo, Bing
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Volume:
46
Language:
english
Journal:
Journal of Electronic Materials
DOI:
10.1007/s11664-016-5251-5
Date:
March, 2017
File:
PDF, 1.49 MB
english, 2017
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