Characteristics of electron emission of Al-Al...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 11 Vol. 32; Iss. 6

Characteristics of electron emission of Al-Al 2 O 3 -Ti/Au diode with a new double-layer insulator

Hu, Yihua, Zhang, Xiaoning, Xue, Tao, Liu, Chunliang
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4900632
Date:
November, 2014
File:
PDF, 1.60 MB
english, 2014
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