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Application of UV photoluminescence imaging spectroscopy for stacking faults identification on thick, lightly n-type doped, 4°-off 4H-SiC epilayers
Thierry-Jebali, N., Kawahara, C., Miyazawa, T., Tsuchida, H., Kimoto, T.Volume:
5
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4915128
Date:
March, 2015
File:
PDF, 17.94 MB
english, 2015