[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Three-Dimensional Compositional Characterization of High-k Gate Dielectrics with LEAP Atom Probe Tomography
Ulfig, Robert M., Thompson, Kieth, Alvis, Roger, Bunton, Joeseph, Gorman, Brian, Larson, DavidVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2728823
File:
PDF, 1.46 MB
english, 2007