Surface chemical structure and doping characteristics of boron-doped Si nanowires fabricated by plasma doping
Oh, Seung-Hoon, Ma, Jin-Won, Bae, Jung Min, Kang, Yu-seon, Ahn, Jae-Pyung, Kang, Hang-Kyu, Chae, Jimin, Suh, Dongchan, Song, Woobin, Kim, Sunjung, Cho, Mann-HoVolume:
419
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.05.015
Date:
October, 2017
File:
PDF, 1.40 MB
english, 2017