Growth of Hydrogenated Nano-crystalline Silicon (nc-Si:H)...

Energy Procedia 2017 / 03 Vol. 110

Growth of Hydrogenated Nano-crystalline Silicon (nc-Si:H) Films by Plasma Enhanced Chemical Vapor Deposition (PE-CVD)

Jadhavar, Ashok, Pawbake, Amit, Waykar, Ravindra, Jadkar, Vijaya, Kulkarni, Rupali, Bhorde, Ajinkya, Rondiya, Sachin, Funde, Adinath, Patil, Dinkar, Date, Abhijit, Pathan, Habib, Jadkar, Sandesh
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Volume:
110
Language:
english
Journal:
Energy Procedia
DOI:
10.1016/j.egypro.2017.03.104
Date:
March, 2017
File:
PDF, 824 KB
english, 2017
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