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Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence
Mitschker, Felix, Steves, Simon, Gebhard, Maximilian, Rudolph, Marcel, Schücke, Lars, Kirchheim, Dennis, Jaritz, Montgomery, Brochhagen, Markus, Hoppe, Christian, Dahlmann, Rainer, Boeke, Marc, BenediLanguage:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aa6e28
Date:
April, 2017
File:
PDF, 988 KB
english, 2017