[IEEE 2017 18th International Symposium on Quality Electronic Design (ISQED) - Santa Clara, CA, USA (2017.3.14-2017.3.15)] 2017 18th International Symposium on Quality Electronic Design (ISQED) - Overview and development of EDA tools for integration of DSA into patterning solutions
Torres, J. Andres, Fenger, Germain, Khaira, Daman, Yuansheng Ma,, Granik, Yuri, Kapral, Chris, Mitra, Joydeep, Krasnova, Polina, Ait-Ferhat, DehiaYear:
2017
Language:
english
DOI:
10.1109/ISQED.2017.7918300
File:
PDF, 361 KB
english, 2017