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[IEEE 2017 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Boise, ID, USA (2017.4.21-2017.4.21)] 2017 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Development of a multifunction prototype for the carrier profiling of semiconductors by scanning frequency comb microscopy
Hagmann, Mark J.Year:
2017
Language:
english
DOI:
10.1109/wmed.2017.7916925
File:
PDF, 141 KB
english, 2017