Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2016 / 07 Vol. 34; Iss. 4
Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growth
Merrell, Andrew, Liu, FengVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4958795
Date:
July, 2016
File:
PDF, 1.50 MB
english, 2016