Graphene processing using electron beam assisted metal...

Graphene processing using electron beam assisted metal deposition and masked chemical vapor deposition growth

Merrell, Andrew, Liu, Feng
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Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4958795
Date:
July, 2016
File:
PDF, 1.50 MB
english, 2016
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