Multiple Roles of Hydrogen Treatments in Amorphous In–Ga–Zn–O Films
Tang, Haochun, Kishida, Yosuke, Ide, Keisuke, Toda, Yoshitake, Hiramatsu, Hidenori, Matsuishi, Satoru, Ueda, Shigenori, Ohashi, Naoki, Kumomi, Hideya, Hosono, Hideo, Kamiya, ToshioVolume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0071707jss
File:
PDF, 1.51 MB
english, 2017