AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY...

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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Introduction of the MC3-II/GP system, medium current ion implanter with enhanced multi-charge beam current

Koike, Masazumi, Sato, Fumiaki, Sano, Makoto, Kawatsu, Sho, Kariya, Hiroyuki, Kimura, Yasuhiko, Kudo, Tetsuya, Shiraishi, Miyuki, Shinozuka, Masamitsu, Takahashi, Yuji, Ishida, Yuji, Tsukihara, Mitsuk
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Year:
2012
Language:
english
DOI:
10.1063/1.4766557
File:
PDF, 254 KB
english, 2012
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