Calculated cross sections for electron collisions with NF...

Plasma Sources Science and Technology 2017 / 05 Vol. 26; Iss. 6

Calculated cross sections for electron collisions with NF 3 , NF 2 and NF with applications to remote plasma sources

Hamilton, James R, Tennyson, Jonathan, Huang, Shuo, Kushner, Mark J
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Volume:
26
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/1361-6595/aa6bdf
Date:
May, 2017
File:
PDF, 2.00 MB
english, 2017
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