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[IEEE 2017 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Boise, ID, USA (2017.4.21-2017.4.21)] 2017 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Increased versatility for carrier profiling of semiconductors by scanning frequency comb microscopy (SFCM)
Birch, Timothy, Hagmann, Mark J.Year:
2017
Language:
english
DOI:
10.1109/WMED.2017.7916928
File:
PDF, 96 KB
english, 2017