[IEEE 2017 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Boise, ID, USA (2017.4.21-2017.4.21)] 2017 IEEE Workshop on Microelectronics and Electron Devices (WMED) - Polyoxometalate Hybrid Nano-Building Blocks for Extreme Ultra-Violet Photoresists
Hardie, Brandon, Roll, MarkYear:
2017
Language:
english
DOI:
10.1109/WMED.2017.7916932
File:
PDF, 6.94 MB
english, 2017