SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Use of thermomigration in MEMS technology
Buchin, Eduard Y., Denisenko, Yuri I., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.683500
File:
PDF, 852 KB
english, 2012