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Determination of trap density in hafnia films produced by two atomic layer deposition techniques
Islamov, D.R., Gritsenko, V.A., Lebedev, M.S.Volume:
178
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.05.004
Date:
June, 2017
File:
PDF, 593 KB
english, 2017