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Raman characterization of damaged layers of 4H-SiC induced by scratching
Nakashima, Shin-ichi, Mitani, Takeshi, Tomobe, Masaru, Kato, Tomohisa, Okumura, HajimeVolume:
6
Language:
english
Journal:
AIP Advances
DOI:
10.1063/1.4939985
Date:
January, 2016
File:
PDF, 2.83 MB
english, 2016