Controlling adhesion between multi-asperity contacting surfaces in MEMS devices by local heating
Gkouzou, A, Kokorian, J, Janssen, G C A M, van Spengen, W MVolume:
26
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/26/9/095020
Date:
September, 2016
File:
PDF, 2.24 MB
english, 2016