Controlling the boron-to-titanium ratio in...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 09 Vol. 35; Iss. 5

Controlling the boron-to-titanium ratio in magnetron-sputter-deposited TiB x thin films

Petrov, Ivan, Hall, Allen, Mei, Antonio B., Nedfors, Nils, Zhirkov, Igor, Rosen, Johanna, Reed, Amber, Howe, Brandon, Greczynski, Grzegorz, Birch, Jens, Hultman, Lars, Greene, J. E.
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4982649
Date:
September, 2017
File:
PDF, 810 KB
english, 2017
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