![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE The International Conference on Micro- and Nano-Electronics 2016 - Zvenigorod, Russian Federation (Monday 3 October 2016)] International Conference on Micro- and Nano-Electronics 2016 - Formation of nanoporous structure in silicon substrate using two-stage annealing process
Lukichev, Vladimir F., Rudenko, Konstantin V., Denisenko, Yuri I., Rudakov, Valery I.Volume:
10224
Year:
2016
Language:
english
DOI:
10.1117/12.2267071
File:
PDF, 673 KB
english, 2016