Run-To-Run Control of the Czochralski Process

Run-To-Run Control of the Czochralski Process

Rahmanpour, Parsa, Sælid, Steinar, Hovd, Morten
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Language:
english
Journal:
Computers & Chemical Engineering
DOI:
10.1016/j.compchemeng.2017.05.001
Date:
May, 2017
File:
PDF, 1.23 MB
english, 2017
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