Fabrication of Novel MEMS Microgrippers by Deep Reactive...

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Journal of Microelectromechanical Systems 2017

Fabrication of Novel MEMS Microgrippers by Deep Reactive Ion Etching With Metal Hard Mask

Bagolini, Alvise, Ronchin, Sabina, Bellutti, Pierluigi, Chiste, Matteo, Verotti, Matteo, Belfiore, Nicola Pio
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Year:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2696033
File:
PDF, 6.83 MB
english, 2017
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