SPIE Proceedings [SPIE SPIE Defense + Security - Anaheim, California, United States (Sunday 9 April 2017)] Micro- and Nanotechnology Sensors, Systems, and Applications IX - Energy harvesting based on piezoelectric AlN and AlScN thin films deposited by high rate sputtering
George, Thomas, Dutta, Achyut K., Islam, M. Saif, Frach, Peter, Barth, Stephan, Bartzsch, Hagen, Gloess, DanielVolume:
10194
Year:
2017
Language:
english
DOI:
10.1117/12.2262460
File:
PDF, 1.67 MB
english, 2017