Effects of ultra-shallow ion implantation from RF plasma...

Effects of ultra-shallow ion implantation from RF plasma onto electrical properties of 4H-SiC MIS structures with SiO x /HfO x and SiO x N y /HfO x double-gate dielectric stacks

Mroczyński, Robert, Kwietniewski, Norbert, Konarski, Piotr
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
178
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2017.05.017
Date:
June, 2017
File:
PDF, 1.22 MB
english, 2017
Conversion to is in progress
Conversion to is failed