Crystallographic orientation dependence of SEM contrast...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2015 / 07 Vol. 33; Iss. 4

Crystallographic orientation dependence of SEM contrast revealed by SiC polytypes

Ashida, Koji, Kajino, Tomonori, Kutsuma, Yasunori, Ohtani, Noboru, Kaneko, Tadaaki
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4927136
Date:
July, 2015
File:
PDF, 2.32 MB
english, 2015
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