Effects of hydrogen ion irradiation on zinc oxide etching

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2017 / 09 Vol. 35; Iss. 5

Effects of hydrogen ion irradiation on zinc oxide etching

Li, Hu, Karahashi, Kazuhiro, Friederich, Pascal, Fink, Karin, Fukasawa, Masanaga, Hirata, Akiko, Nagahata, Kazunori, Tatsumi, Tetsuya, Wenzel, Wolfgang, Hamaguchi, Satoshi
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Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4982715
Date:
September, 2017
File:
PDF, 1.77 MB
english, 2017
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