Practical CMUT Fabrication With a Nitride-to-Oxide-Based...

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Journal of Microelectromechanical Systems 2017

Practical CMUT Fabrication With a Nitride-to-Oxide-Based Wafer Bonding Process

Chen, Albert I. H., Wong, Lawrence L. P., Li, Zhenhao, Na, Shuai, Yeow, John T. W.
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Year:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2675987
File:
PDF, 1.93 MB
english, 2017
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