Effect of hydrogen peroxide pretreatment on ZnO-based metal–semiconductor–metal ultraviolet photodetectors deposited using plasma-enhanced atomic layer deposition
Lin, Yu-Chang, Lee, Hsin-Ying, Lee, Tsung-HsinVolume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4933169
Date:
January, 2016
File:
PDF, 1.58 MB
english, 2016