Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 05 Vol. 35; Iss. 3
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Low temperature carrier transport mechanism in high-mobility zinc oxynitride thin-film transistors
Kim, Hee-Joong, Hong, Sae-Young, Kim, Dae-Hwan, Jeong, Hwan-Seok, Kwon, Hyuck-InVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4983528
Date:
May, 2017
File:
PDF, 1.05 MB
english, 2017