Research on Si (100) Crystal Substrate CMP Based on FA/O...

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Applied Surface Science 2017 / 5

Research on Si (100) Crystal Substrate CMP Based on FA/O alkaline slurry

Hong, Jiao, Niu, Xinhuan, Wang, Juan, Wang, Chenwei, Zhang, Baoguo, Wang, Ru, Sun, Ming, Liu, Yuling
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Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.05.128
Date:
May, 2017
File:
PDF, 288 KB
english, 2017
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