[IEEE 2016 5th International Symposium on Next-Generation Electronics (ISNE) - Hsinchu, Taiwan (2016.5.4-2016.5.6)] 2016 5th International Symposium on Next-Generation Electronics (ISNE) - The effects of plating current and rotation speed on the microstructural properties of electrochemical plated Cu films
Wang, Wei-Lin, Liu, Shi-Jun, Yeh, Ming-Hsin, Kuo, Hsien-Chang, Chien, Hung-Ju, Ying, Tzung-HuaYear:
2016
Language:
english
DOI:
10.1109/isne.2016.7543401
File:
PDF, 1.46 MB
english, 2016