Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 05 Vol. 35; Iss. 3
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High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses
Richter, Karola, Mocker, André, Bartha, Johann-WolfgangVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4982712
Date:
May, 2017
File:
PDF, 2.61 MB
english, 2017