High quality semicontinuous deep reactive ion etching of...

High quality semicontinuous deep reactive ion etching of silicon for the creation of x-ray lenses

Richter, Karola, Mocker, André, Bartha, Johann-Wolfgang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4982712
Date:
May, 2017
File:
PDF, 2.61 MB
english, 2017
Conversion to is in progress
Conversion to is failed