Design, Optimization, and Realization of a High-Performance...

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Journal of Microelectromechanical Systems 2017

Design, Optimization, and Realization of a High-Performance MOEMS Accelerometer From a Double-Device-Layer SOI Wafer

Lu, Qianbo, Bai, Jian, Wang, Kaiwei, He, Sailing
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Year:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2693341
File:
PDF, 3.61 MB
english, 2017
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