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Hydrogen Plasma Characterization at Low Pressure in 2.45 GHz Electron Cyclotron Resonance Proton Ion Source
Roychowdhury, Pradip, Mishra, Love, Kewlani, Hitesh, Gharat, SurendraVolume:
45
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2017.2679758
Date:
April, 2017
File:
PDF, 1.21 MB
english, 2017