Visualization of Electrons Localized in Metal–Oxide–Nitride–Oxide–Semiconductor Flash Memory Thin Gate Films by Detecting High-Order Nonlinear Permittivity Using Scanning Nonlinear Dielectric Microscopy
Honda, Koichiro, Cho, YasuoVolume:
5
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.5.036602
Date:
February, 2012
File:
PDF, 1.58 MB
english, 2012