Preparation of rare earth CeO2 thin films using metal...

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Journal of Materials Science: Materials in Electronics 2017 / 5

Preparation of rare earth CeO2 thin films using metal organic decomposition method for metal-oxide–semiconductor capacitors

Agrawal, Khushabu S., Patil, Vilas S., Khairnar, Anil G., Mahajan, Ashok M.
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Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-017-7072-6
Date:
May, 2017
File:
PDF, 1.06 MB
english, 2017
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