Scaling aerosol assisted chemical vapour deposition:...

Scaling aerosol assisted chemical vapour deposition: Exploring the relationship between growth rate and film properties

Powell, Michael J., Potter, Dominic B., Wilson, Rachel L., Darr, Jawwad A., Parkin, Ivan P., Carmalt, Claire J.
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Volume:
129
Language:
english
Journal:
Materials & Design
DOI:
10.1016/j.matdes.2017.05.017
Date:
September, 2017
File:
PDF, 1.36 MB
english, 2017
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