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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Neutralization of space charge on high-current low-energy ion beam by low-energy electrons supplied from silicon based field emitter arrays
Gotoh, Yasuhito, Tsuji, Hiroshi, Taguchi, Shuhei, Ikeda, Keita, Kitagawa, Takayuki, Ishikawa, Junzo, Sakai, ShigekiYear:
2012
Language:
english
DOI:
10.1063/1.4766565
File:
PDF, 223 KB
english, 2012