Thin films-preparation, structure and properties. Film formation and influence of ions on crystal growth using ionized cluster beams.
MATSUBARA, Kakuei, KOYANAGI, Tsuyoshi, TAKAGI, ToshinoriYear:
1987
Journal:
NIPPON KAGAKU KAISHI
DOI:
10.1246/nikkashi.1987.1916
File:
PDF, 6.82 MB
1987