![](/img/cover-not-exists.png)
[IEEE 2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Dresden, Germany (2017.4.3-2017.4.5)] 2017 18th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Air-coupled PMUT at 100 kHz with PZT active layer and residual stresses: Multiphysics model and experimental validation
Massimino, G., D'Alessandro, L., Procopio, F., Ardito, R., Ferrera, M., Corigliano, A.Year:
2017
Language:
english
DOI:
10.1109/eurosime.2017.7926253
File:
PDF, 6.25 MB
english, 2017