Ultrahigh-Temperature Oxidation of 4H-SiC(0001) and an...

Materials Science Forum 2017 / 5 Vol. 897

Ultrahigh-Temperature Oxidation of 4H-SiC(0001) and an Impact of Cooling Process on SiO2/SiC Interface Properties

Hosoi, Takuji, Nagai, Daisuke, Sometani, Mitsuru, Shimura, Takayoshi, Takei, Manabu, Watanabe, Heiji
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Volume:
897
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.897.323
Date:
May, 2017
File:
PDF, 655 KB
english, 2017
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