Synthesis of ultrasmall silica nanoparticles for application as deep-ultraviolet antireflection coatings
Liu, Xiaonan, Lu, Xirui, Wen, Pan, Shu, Xiaoyan, Chi, FangtingLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.05.124
Date:
May, 2017
File:
PDF, 1.60 MB
english, 2017