Optical diagnostics for the highly populated tail of an electron energy distribution function in very-high-frequency capacitively coupled plasma using spin- and dipole-forbidden lines
Roh, Hyun-Joon, Kim, Nam-Kyun, Ryu, Sangwon, Jang, Yunchang, Kim, Gon-HoVolume:
50
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/1361-6463/aa6cf8
Date:
June, 2017
File:
PDF, 2.04 MB
english, 2017