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Effect of the filament discharge current on the microstructure and performance of plasma-enhanced magnetron sputtered TiN coatings
Zhang, Xin, Zhou, Yan-Wen, Gao, Jian-Bo, Zhao, Zhi-Wei, Guo, Yuan-Yuan, Xie, Zhi-Wen, Kelly, PeterLanguage:
english
Journal:
Journal of Alloys and Compounds
DOI:
10.1016/j.jallcom.2017.05.037
Date:
May, 2017
File:
PDF, 2.69 MB
english, 2017