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Molecular Dynamics Simulations of Reactions of Hyperthermal Fluorine Atoms with Fluorosilyl Adsorbates on the Si{100}-( 2 × 1) Surface
Galijatovic, Alema, Darcy, Adam, Acree, Ben, Fullbright, George, McCormac, Rupert, Green, Bryan, Krantzman, Kristin D., Schoolcraft, Tracy A.Volume:
100
Language:
english
Journal:
The Journal of Physical Chemistry
DOI:
10.1021/jp960058t
Date:
January, 1996
File:
PDF, 544 KB
english, 1996