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Exceptional gettering response of epitaxially grown kerfless silicon
Powell, D. M., Markevich, V. P., Hofstetter, J., Jensen, M. A., Morishige, A. E., Castellanos, S., Lai, B., Peaker, A. R., Buonassisi, T.Volume:
119
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4940947
Date:
February, 2016
File:
PDF, 1.31 MB
english, 2016