High-voltage 4H-SiC PiN diodes with the etched implant junction termination extension
Li, Juntao, Xiao, Chengquan, Xu, Xingliang, Dai, Gang, Zhang, Lin, Zhou, Yang, Xiang, An, Yang, Yingkun, Zhang, JianVolume:
38
Language:
english
Journal:
Journal of Semiconductors
DOI:
10.1088/1674-4926/38/2/024003
Date:
February, 2017
File:
PDF, 3.34 MB
english, 2017